December 24, 2020 – Leading Atomic Layer Deposition (ALD) technology solution provider, Beneq announces an upcoming webinar organized to help educate process engineers and equipment engineers, and others on minimizing metal and particle contamination. Reputable for developing the world’s most transparent displays in the world with clients across Fortune 500 companies.
Learn more from Sami Sneck, Business Executive at Beneq, about anti-corrosion coatings using ALD. Join the joint webinar with SEMI on January 27. This webinar is beneficial for process engineers, equipment engineers, and others responsible for contamination control and equipment yield.
Semiconductor manufacturing involves corrosive gases in multiple processes. As we transition to each new technology node, e.g., from 10nm to 7nm and 5nm, there are even more stringent fab requirements against metal and particle contamination. This poses challenges for existing coating methods such as anodization or plasma spray, which may not provide complete protection, especially on critical chamber components with complex geometry.
In this webinar, Beneq, the home of ALD, will talk more about:
• Common issues of metal or particle contamination on critical chamber components
• Common coating methods against corrosion, and how they compare
• What properties to look for, e.g., purity, uniformity when evaluating the optimal protective coating solution
• Unique benefits of ALD coatings with Al2O3 and Y2O3
• Working with OEM partners to design, test, and implement an ALD coating solution.
Register for the webinar here.
Beneq is the home of ALD, offering a comprehensive portfolio of equipment products and development services. Today Beneq leads the market with innovative solutions for advanced R&D (TFS 200, R2), flexible high-volume manufacturing (BENEQ TransformTM), ultra-fast high precision spatial ALD coatings (C2R), roll-to-roll thin film coating of continuous webs (WCS 600), and specialized batch production for thicker film stacks (P400, P800). Headquartered in Espoo, Finland, Beneq is dedicated to making ALD technology accessible for researchers and enabling mega technology trends through engineered ALD materials solutions.
To learn more, please visit Beneq.com